Activation and deactivation of implanted B in Si
- Pelaz, L.
- Venezia, V.C.
- Gossmann, H.-J.
- Gilmer, G.H.
- Fiory, A.T.
- Rafferty, C.S.
- Jaraiz, M.
- Barbolla, J.
ISSN: 0003-6951
Année de publication: 1999
Volumen: 75
Número: 5
Pages: 662-664
Type: Article