Kinetic Monte Carlo simulations: An accurate bridge between ab initio calculations and standard process experimental data

  1. Jaraiz, M.
  2. Rubio, E.
  3. Castrillo, P.
  4. Pelaz, L.
  5. Bailon, L.
  6. Barbolla, J.
  7. Gilmer, G.H.
  8. Rafferty, C.S.
Journal:
Materials Science in Semiconductor Processing

ISSN: 1369-8001

Year of publication: 2000

Volume: 3

Issue: 1-2

Pages: 59-63

Type: Article

DOI: 10.1016/S1369-8001(00)00013-5 GOOGLE SCHOLAR