Atomistic modeling of complex silicon processing scenarios

  1. Jaraiz, M.
  2. Castrillo, P.
  3. Pinacho, R.
  4. Pelaz, L.
  5. Barbolla, J.
  6. Gilmer, G.H.
  7. Rafferty, C.S.
Proceedings:
Materials Research Society Symposium - Proceedings

ISSN: 0272-9172

Year of publication: 2000

Volume: 610

Type: Conference paper

DOI: 10.1557/PROC-610-B11.1 GOOGLE SCHOLAR