Algorithm for statistical noise reduction in three-dimensional ion implant simulations

  1. Hernández-Mangas, J.M.
  2. Arias, J.
  3. Jaraiz, M.
  4. Bailón, L.
  5. Barbolla, J.
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 2001

Alea: 174

Zenbakia: 4

Orrialdeak: 433-438

Mota: Artikulua

DOI: 10.1016/S0168-583X(00)00627-3 GOOGLE SCHOLAR
Datuen iturria: Scopus