Algorithm for statistical noise reduction in three-dimensional ion implant simulations

  1. Hernández-Mangas, J.M.
  2. Arias, J.
  3. Jaraiz, M.
  4. Bailón, L.
  5. Barbolla, J.
Revue:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Année de publication: 2001

Volumen: 174

Número: 4

Pages: 433-438

Type: Article

DOI: 10.1016/S0168-583X(00)00627-3 GOOGLE SCHOLAR
La source de données: Scopus