Study of defects in conformal GaAs/Si layers by optical techniques and photoetching

  1. Ardila, A.M.
  2. Martínez, O.
  3. Sanz, L.F.
  4. Avella, M.
  5. Jiménez, J.
  6. Napierala, J.
  7. Gil-Lafon, E.
  8. Gérard, B.
Revue:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Année de publication: 2002

Volumen: 91-92

Pages: 70-74

Type: Communication dans un congrès

DOI: 10.1016/S0921-5107(01)00974-6 GOOGLE SCHOLAR
La source de données: Scopus