Doping profiles of n-type GaAs layers grown on Si by the conformal method

  1. Ardila, A.M.
  2. Martínez, O.
  3. Avella, M.
  4. Jiménez, J.
  5. Gérard, B.
  6. Napierala, J.
  7. Gil-Lafon, E.
Aldizkaria:
Materials Research Society Symposium - Proceedings

ISSN: 0272-9172

Argitalpen urtea: 2002

Alea: 692

Orrialdeak: 417-422

Mota: Artikulua