Controlled fabrication by LPCVD of luminescent SiGe/SiO2 (LTO) very thin multilayers

  1. Rodríguez, A.
  2. Sangrador, J.
  3. Rodríguez, T.
  4. Avella, M.
  5. Prieto, A.C.
  6. Jiménez, J.
  7. Ortiz, M.I.
  8. Ballesteros, C.
Proceedings:
Materials Research Society Symposium - Proceedings

ISSN: 0272-9172

Year of publication: 2003

Volume: 794

Pages: 77-82

Type: Conference paper

DOI: 10.1557/PROC-794-T3.35 GOOGLE SCHOLAR