A kinetic Monte Carlo annealing assessment of the dominant features from ion implant simulations
ISSN: 0921-5107
Year of publication: 2004
Volume: 114-115
Issue: SPEC. ISS.
Pages: 345-348
Type: Conference paper
ISSN: 0921-5107
Year of publication: 2004
Volume: 114-115
Issue: SPEC. ISS.
Pages: 345-348
Type: Conference paper