A kinetic Monte Carlo annealing assessment of the dominant features from ion implant simulations

  1. Martin-Bragado, I.
  2. Jaraiz, M.
  3. Castrillo, P.
  4. Pinacho, R.
  5. Rubio, J.E.
  6. Barbolla, J.
Revue:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Année de publication: 2004

Volumen: 114-115

Número: SPEC. ISS.

Pages: 345-348

Type: Communication dans un congrès

DOI: 10.1016/J.MSEB.2004.07.060 GOOGLE SCHOLAR
La source de données: Scopus