Atomistic analysis of the ion beam induced defect evolution

  1. Aboy, M.
  2. Pelaz, L.
  3. Marqués, L.A.
  4. Barbolla, J.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2004

Volume: 216

Issue: 1-4

Pages: 100-104

Type: Conference paper

DOI: 10.1016/J.NIMB.2003.11.027 GOOGLE SCHOLAR
Data source: Scopus