Atomistic simulations in Si processing: Bridging the gap between atoms and experiments

  1. Marqués, L.A.
  2. Pelaz, L.
  3. López, P.
  4. Aboy, M.
  5. Santos, I.
  6. Barbolla, J.
Journal:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Year of publication: 2005

Volume: 124-125

Issue: SUPPL.

Pages: 72-80

Type: Conference paper

DOI: 10.1016/J.MSEB.2005.08.106 GOOGLE SCHOLAR
Data source: Scopus