Atomistic simulations in Si processing: Bridging the gap between atoms and experiments

  1. Marqués, L.A.
  2. Pelaz, L.
  3. López, P.
  4. Aboy, M.
  5. Santos, I.
  6. Barbolla, J.
Aldizkaria:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Argitalpen urtea: 2005

Alea: 124-125

Zenbakia: SUPPL.

Orrialdeak: 72-80

Mota: Biltzar ekarpena

DOI: 10.1016/J.MSEB.2005.08.106 GOOGLE SCHOLAR
Datuen iturria: Scopus