InP surface properties under ICP plasma etching using mixtures of chlorides and hydrides
- Liu, B.
- Landesman, J.-P.
- Leclercq, J.-L.
- Rhallabi, A.
- Avella, M.
- González, M.A.
- Jiménez, J.
- Guilet, S.
- Cardinaud, C.
- Pommereau, F.
ISSN: 1092-8669
ISBN: 9780780395589
Year of publication: 2006
Volume: 2006
Pages: 278-281
Type: Conference paper