Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth

1. Mok, K.R.C.
2. Colombeau, B.
3. Jaraiz, M.
4. Castrillo, P.
5. Rubio, J.E.
6. Pinacho, R.
7. Srinivasan, M.P.
8. Benistant, F.
9. Martin-Bragado, I.
10. Hamilton, J.J.