Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth
- Mok, K.R.C.
- Colombeau, B.
- Jaraiz, M.
- Castrillo, P.
- Rubio, J.E.
- Pinacho, R.
- Srinivasan, M.P.
- Benistant, F.
- Martin-Bragado, I.
- Hamilton, J.J.
ISSN: 0272-9172
ISBN: 9781558998681
Ano de publicación: 2006
Volume: 912
Páxinas: 99-104
Tipo: Achega congreso