Current capabilities and future prospects of atomistic process simulation

  1. Jaraiz, M.
  2. Castrillo, P.
  3. Pinacho, R.
  4. Rubio, J.E.
Proceedings:
Technical Digest - International Electron Devices Meeting, IEDM

ISSN: 0163-1918

Year of publication: 2007

Pages: 951-954

Type: Conference paper

DOI: 10.1109/IEDM.2007.4419110 GOOGLE SCHOLAR
Data source: Scopus