Molecular dynamics study of damage generation mechanisms in silicon at the low energy regime

  1. Santos, I.
  2. Marqués, L.A.
  3. Pelaz, L.
  4. López, P.
Proceedings:
2007 Spanish Conference on Electron Devices, Proceedings

ISBN: 9781424408689

Year of publication: 2007

Pages: 37-40

Type: Conference paper

DOI: 10.1109/SCED.2007.383990 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus