Molecular dynamics study of damage generation mechanisms in silicon at the low energy regime

  1. Santos, I.
  2. Marqués, L.A.
  3. Pelaz, L.
  4. López, P.
Aktak:
2007 Spanish Conference on Electron Devices, Proceedings

ISBN: 9781424408689

Argitalpen urtea: 2007

Orrialdeak: 37-40

Mota: Biltzar ekarpena

DOI: 10.1109/SCED.2007.383990 GOOGLE SCHOLAR

Garapen Iraunkorreko Helburuak

Datuen iturria: Scopus