Boron electrical activation in SOI compared to bulk Si substrates

  1. Aboy, M.
  2. Pelaz, L.
  3. López, P.
  4. Montserrat, J.
  5. Bermúdez, F.J.
Proceedings:
2007 Spanish Conference on Electron Devices, Proceedings

ISBN: 9781424408689

Year of publication: 2007

Pages: 29-32

Type: Conference paper

DOI: 10.1109/SCED.2007.383988 GOOGLE SCHOLAR
Data source: Scopus