Investigation of point defect generation in dry etched InP ridge waveguide structures

  1. Avella, M.
  2. Jiḿnez, J.
  3. Pommereau, F.
  4. Landesman, J.P.
  5. Rhallabi, A.
Journal:
Applied Physics Letters

ISSN: 0003-6951

Year of publication: 2007

Volume: 90

Issue: 22

Type: Article

DOI: 10.1063/1.2743384 GOOGLE SCHOLAR
Data source: Scopus