Investigation of point defect generation in dry etched InP ridge waveguide structures
- Avella, M.
- Jiḿnez, J.
- Pommereau, F.
- Landesman, J.P.
- Rhallabi, A.
Revue:
Applied Physics Letters
ISSN: 0003-6951
Année de publication: 2007
Volumen: 90
Número: 22
Type: Article