Atomistic modeling of defect diffusion in SiGe

  1. Castrillo, P.
  2. Pinacho, R.
  3. Rubio, J.E.
  4. Vega, L.M.
  5. Jaraiz, M.
Aktak:
2007 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2007

ISBN: 9783211728604

Argitalpen urtea: 2007

Orrialdeak: 9-12

Mota: Biltzar ekarpena

DOI: 10.1007/978-3-211-72861-1_2 GOOGLE SCHOLAR
Datuen iturria: Scopus