Atomistic modeling of defect diffusion in SiGe
- Castrillo, P.
- Pinacho, R.
- Rubio, J.E.
- Vega, L.M.
- Jaraiz, M.
Actes de conférence:
2007 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD 2007
ISBN: 9783211728604
Année de publication: 2007
Pages: 9-12
Type: Communication dans un congrès