From point defects to dislocation loops: A comprehensive TCAD model for self-interstitial defects in silicon
- Martin-Bragado, I.
- Avci, I.
- Zographos, N.
- Castrillo, P.
- Jaraiz, M.
Proceedings:
ESSDERC 2007 - Proceedings of the 37th European Solid-State Device Research Conference
ISBN: 9781424411238
Year of publication: 2007
Volume: 2007
Pages: 334-337
Type: Conference paper