From point defects to dislocation loops: A comprehensive TCAD model for self-interstitial defects in silicon

  1. Martin-Bragado, I.
  2. Avci, I.
  3. Zographos, N.
  4. Castrillo, P.
  5. Jaraiz, M.
Actes de conférence:
ESSDERC 2007 - Proceedings of the 37th European Solid-State Device Research Conference

ISBN: 9781424411238

Année de publication: 2007

Volumen: 2007

Pages: 334-337

Type: Communication dans un congrès

DOI: 10.1109/ESSDERC.2007.4430946 GOOGLE SCHOLAR
La source de données: Scopus