Study of atomic layer deposited zirconium oxide thin films by using mono-cyclopentadienyl based precursors

  1. Castán, H.
  2. Dueñas, S.
  3. García, H.
  4. Gómez, A.
  5. Bailón, L.
  6. Kukli, K.
  7. Niinistö, J.
  8. Ritala, M.
  9. Leskelä, M.
Aktak:
Proceedings of the 2009 Spanish Conference on Electron Devices, CDE'09

ISBN: 9781424428397

Argitalpen urtea: 2009

Orrialdeak: 8-11

Mota: Biltzar ekarpena

DOI: 10.1109/SCED.2009.4800416 GOOGLE SCHOLAR