Electric and magnetic properties of atomic layer deposited ZrO 2 -HfO 2 thin films

  1. Kalam, K.
  2. Seemen, H.
  3. Mikkor, M.
  4. Ritslaid, P.
  5. Stern, R.
  6. Dueñas, S.
  7. Castán, H.
  8. Tamm, A.
  9. Kukli, K.
Journal:
ECS Journal of Solid State Science and Technology

ISSN: 2162-8777,  2162-8769

Year of publication: 2018

Volume: 7

Issue: 9

Pages: N117-N122

Type: Article

DOI: 10.1149/2.0041809JSS GOOGLE SCHOLAR lock_openOpen access editor
Data source: Scopus