Advanced electrical characterization of atomic layer deposited Al2O3 MIS-based structures
- Garcia, H.
- Castan, H.
- Duenas, S.
- Gonzalez, M.B.
- Acero, M.C.
- Campabadal, F.
Konferenzberichte:
2017 Spanish Conference on Electron Devices, CDE 2017
ISBN: 9781509050727
Datum der Publikation: 2017
Art: Konferenz-Beitrag