Advanced electrical characterization of atomic layer deposited Al2O3 MIS-based structures

  1. Garcia, H.
  2. Castan, H.
  3. Duenas, S.
  4. Gonzalez, M.B.
  5. Acero, M.C.
  6. Campabadal, F.
Proceedings:
2017 Spanish Conference on Electron Devices, CDE 2017

ISBN: 9781509050727

Year of publication: 2017

Type: Conference paper

DOI: 10.1109/CDE.2017.7905235 GOOGLE SCHOLAR
Data source: Scopus