Modeling charged defects, dopant diffusion and activation mechanisms for TCAD simulations using kinetic Monte Carlo
- Martin-Bragado, I.
- Tian, S.
- Johnson, M.
- Castrillo, P.
- Pinacho, R.
- Rubio, J.
- Jaraiz, M.
ISSN: 0168-583X
Year of publication: 2006
Volume: 253
Issue: 1-2
Pages: 63-67
Type: Article