The effect of carbon/self-interstitial clusters on carbon diffusion in silicon modeled by kinetic Monte Carlo simulations

  1. Pinacho, R.
  2. Jaraíz, M.
  3. Gossmann, H.J.
  4. Gilmer, G.H.
  5. Benton, J.L.
  6. Werner, P.
Proceedings:
Materials Research Society Symposium - Proceedings

ISSN: 0272-9172

Year of publication: 2000

Volume: 610

Type: Conference paper