The effect of carbon/self-interstitial clusters on carbon diffusion in silicon modeled by kinetic Monte Carlo simulations
- Pinacho, R.
- Jaraíz, M.
- Gossmann, H.J.
- Gilmer, G.H.
- Benton, J.L.
- Werner, P.
Proceedings:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Year of publication: 2000
Volume: 610
Type: Conference paper