Simulations of thin film deposition from atomic and cluster beams

  1. Gilmer, G.H.
  2. Roland, C.
  3. Stock, D.
  4. Jaraiz, M.
  5. Diaz De La Rubia, T.
Journal:
Materials Science and Engineering B

ISSN: 0921-5107

Year of publication: 1996

Volume: 37

Issue: 1-3

Pages: 1-7

Type: Article

DOI: 10.1016/0921-5107(95)01449-7 GOOGLE SCHOLAR
Data source: Scopus