Molecular dynamics simulation of the early stages of self-interstitial clustering in silicon

  1. Marqués, L.A.
  2. Aboy, M.
  3. Ruiz, M.
  4. Santos, I.
  5. López, P.
  6. Pelaz, L.
Journal:
Materials Science in Semiconductor Processing

ISSN: 1369-8001

Year of publication: 2016

Volume: 42

Pages: 235-238

Type: Article

DOI: 10.1016/J.MSSP.2015.07.020 GOOGLE SCHOLAR lock_openUVADOC editor
UVaDOC. Repositorio Documental de la Universidad de Valladolid: lock_openOpen access Externo lock_openOpen access Externo

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