Evaluation of free-carrier concentration in Si+-implanted InP by means of photoluminescence
- Ibáez, J.
- Cuscó, R.
- Artús, L.
- De La Puente, E.
- Jiménez, J.
ISSN: 0168-583X
Year of publication: 2001
Volume: 175-177
Pages: 246-251
Type: Conference paper
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms