Evaluation of free-carrier concentration in Si+-implanted InP by means of photoluminescence

  1. Ibáez, J.
  2. Cuscó, R.
  3. Artús, L.
  4. De La Puente, E.
  5. Jiménez, J.
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 2001

Alea: 175-177

Orrialdeak: 246-251

Mota: Biltzar ekarpena

DOI: 10.1016/S0168-583X(01)00449-9 GOOGLE SCHOLAR
Datuen iturria: Scopus