Atomistic modeling of laser-related phenomena
- Marqués, L.A.
- Aboy, M.
- López, P.
- Santos, I.
- Pelaz, L.
- Fisicaro, G.
Buch:
Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics
ISBN: 9780128202555
Datum der Publikation: 2021
Seiten: 79-136
Art: Buch-Kapitel