Atomistic modeling of laser-related phenomena

  1. Marqués, L.A.
  2. Aboy, M.
  3. López, P.
  4. Santos, I.
  5. Pelaz, L.
  6. Fisicaro, G.
Book:
Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics

ISBN: 9780128202555

Year of publication: 2021

Pages: 79-136

Type: Book chapter

DOI: 10.1016/B978-0-12-820255-5.00003-9 GOOGLE SCHOLAR
Data source: Scopus