Defects and diffusion in MeV implanted silicon
- Venezia, VC
- Haynes, TE
- Agarwal, A
- Gossmann, HJ
- Pelaz, L
- Jacobson, DC
- Eaglesham, DJ
- Duggan, JL
- Duggan, JL (coord.)
- Morgan, IL (coord.)
ISSN: 0094-243X
ISBN: 1-56396-825-8
Año de publicación: 1999
Volumen: 475
Páginas: 784-788
Congreso: 15th International Conference on the Application of Accelerators in Research and Industry
Tipo: Aportación congreso