Characterization of the new type of structural defects in Si by the scanning optical and electron beam techniques
- Eremenko, V
- Jimenez, J
- Fedorov, A
- Garcia, C
- Sanz, LF
- Avella, M
- Donecker, J (coord.)
- Rechenberg, I (coord.)
ISSN: 0951-3248
ISBN: 0-7503-0500-2
Año de publicación: 1998
Volumen: 160
Páginas: 269-272
Congreso: 7th International Conference on Defect Recognition and Image Processing in Semiconductors (DRIP-VII)
Tipo: Aportación congreso