Modeling of boron diffusion in silicon-germanium alloys using Kinetic Monte Carlo

  1. Dopico, I.
  2. Castrillo, P.
  3. Martin-Bragado, I.
Journal:
Solid-State Electronics

ISSN: 0038-1101

Year of publication: 2014

Volume: 93

Pages: 61-65

Type: Article

DOI: 10.1016/J.SSE.2013.12.007 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus