Molecular Dynamics Study of Stress Relaxation During Ge Deposition on Si(100) 2× 1 Substrates

  1. Martin-Encinar, L.
  2. Marques, L.A.
  3. Aboy, M.
  4. Lopez, P.
  5. Santos, I.
  6. Pelaz, L.
Aktak:
14th Spanish Conference on Electron Devices, CDE 2023 - Proceedings

ISBN: 9798350302400

Argitalpen urtea: 2023

14th Spanish Conference on Electron Devices, CDE 2023 - Proceedings

Mota: Biltzar ekarpena

DOI: 10.1109/CDE58627.2023.10339527 GOOGLE SCHOLAR

Garapen Iraunkorreko Helburuak

Datuen iturria: Scopus