Robert B.
Simonton
Publications dans lesquelles il/elle collabore avec Robert B. Simonton (2)
1998
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Damage, defects and diffusion from ultra-low energy (0-5 keV) ion implantation of silicon
Materials Science in Semiconductor Processing, Vol. 1, Núm. 1, pp. 17-25
1997
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Boron-Enhanced-Diffusion of boron: The limiting factor for ultra-shallow junctions
Technical Digest - International Electron Devices Meeting, IEDM