MARTIN
JARAIZ MALDONADO
CATEDRATICOS DE UNIVERSIDAD
Oak Ridge National Laboratory
Oak Ridge, Estados UnidosOak Ridge National Laboratory-ko ikertzaileekin lankidetzan egindako argitalpenak (1)
1997
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Physical mechanisms of transient enhanced dopant diffusion in ion-implanted silicon
Journal of Applied Physics, Vol. 81, Núm. 9, pp. 6031-6050