MARTIN
JARAIZ MALDONADO
PROFESOR EMERITO
Philips Research Eindhoven
Amsterda, HolandaPublikationen in Zusammenarbeit mit Forschern von Philips Research Eindhoven (5)
1999
-
Cluster ripening and transient enhanced diffusion in silicon
Materials Science in Semiconductor Processing, Vol. 2, Núm. 4, pp. 369-376
-
Energetics of self-interstitial clusters in si
Physical Review Letters, Vol. 82, Núm. 22, pp. 4460-4463
-
Fundamental diffusion issues for deep-submicron device processing
Technical Digest - International Electron Devices Meeting
-
Ostwald ripening of {113} defects precursors and transient enhanced diffusion
Materials Research Society Symposium - Proceedings, Vol. 568, pp. 163-168
1997
-
Physical mechanisms of transient enhanced dopant diffusion in ion-implanted silicon
Journal of Applied Physics, Vol. 81, Núm. 9, pp. 6031-6050