Publikationen in Zusammenarbeit mit Forschern von Consiglio Nazionale delle Ricerche (2)

2009

  1. Growth and characterization of 3C-SiC films for Micro Electro Mechanical Systems (MEMS) applications

    Crystal Growth and Design, Vol. 9, Núm. 11, pp. 4852-4859

  2. Strain evaluation in SiC MEMS test structures

    ECS Transactions