GERMAN
DIAZ GONZALEZ
Forscher in der Zeit 1989-2007
![Foto de Kaupo](/img/nophoto.png)
Kaupo
Kukli
Publikationen, an denen er mitarbeitet Kaupo Kukli (2)
2005
-
A comparative study of the electrical properties of TiO2 films grown by high-pressure reactive sputtering and atomic layer deposition
Semiconductor Science and Technology, Vol. 20, Núm. 10, pp. 1044-1051
-
Interface quality of high-pressure reactive sputtered and atomic layer deposited titanium oxide thin films on silicon
2005 Spanish Conference on Electron Devices, Proceedings