Publications by the researcher in collaboration with M. A. W. Verheijen (3)

2008

  1. Evolution of fluorine and boron profiles during annealing in crystalline Si

    Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, Vol. 26, Núm. 1, pp. 377-381

  2. F+ implants in crystalline Si: The Si interstitial contribution

    Materials Research Society Symposium Proceedings

  3. Si interstitial contribution of F+ implants in crystalline Si

    Journal of Applied Physics, Vol. 103, Núm. 9