ETS INGENIEROS TELECOMUNICACION
Center


Vienna University of Technology
Viena, AustriaPublications in collaboration with researchers from Vienna University of Technology (2)
2000
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Dose, energy, and ion species dependence of the effective plus factor for transient enhanced diffusion
Journal of the Electrochemical Society, Vol. 147, Núm. 9, pp. 3494-3501
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Use of transient enhanced diffusion to tailor boron out-diffusion
IEEE Transactions on Electron Devices, Vol. 47, Núm. 7, pp. 1401-1405