Optical spectroscopic study of the SiN/HfO2 interfacial formation during rf sputtering of HfO2
- Toledano-Luque, M.
- Lucía, M.L.
- Del Prado, A.
- San Andŕs, E.
- Mártil, I.
- González-Díaz, G.
Journal:
Applied Physics Letters
ISSN: 0003-6951
Year of publication: 2007
Volume: 91
Issue: 19
Type: Article