Optical spectroscopic study of the SiN/HfO2 interfacial formation during rf sputtering of HfO2
- Toledano-Luque, M.
- Lucía, M.L.
- Del Prado, A.
- San Andŕs, E.
- Mártil, I.
- González-Díaz, G.
Aldizkaria:
Applied Physics Letters
ISSN: 0003-6951
Argitalpen urtea: 2007
Alea: 91
Zenbakia: 19
Mota: Artikulua